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Comparative first-principles analysis of crystalline versus amorphous CeO2 particles: implications for chemical mechanical planarization

Published Online: 2024-06-13

Published Print: 2024-07

Authors

Park, Sungwon

Seo, Jihoon https://orcid.org/0000-0003-3946-6476
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Text and Data Mining valid from 2024-06-13

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Article History

Received: 23 January 2024

Accepted: 3 June 2024

First Online: 13 June 2024

Declarations

:

: All the authors have no conflict of interest.

: All the authors declare that the manuscript does not have studies on human subjects, human data or tissue, or animals.

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