Crossmark

Regulating the coefficient of thermal expansion in electrodeposited Invar alloy films for fine metal masks via vacuum and hydrogen annealing

Published Online: 2024-09-15

Published Print: 2024-09

Authors

Ren, Wei

Yu, Yu

Lan, Xi

Guo, Lei

Guo, Zhancheng https://orcid.org/0000-0002-8603-3107
Funding

Funding for this research was provided by:

the National Key R&D Program Project (2022YF-C2906100)

the China Minmetals Science and Technology Project (2020ZXA01)

National Natural Science Foundation of China (52174275, 52304342)
License Information

Text and Data Mining valid from 2024-09-01

Version of Record valid from 2024-09-01
More Information

Article History

Received: 20 June 2024

Accepted: 5 September 2024

First Online: 15 September 2024

Declarations

:

: The authors declare that they have no known competing financial interests or personal relationships.

: Not applicable.

Document is current