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Effect of passivation layers in bilayer with ZrO2 on Ge substrate for improved thermal stability

Published Online: 2024-10-23

Published Print: 2024-11

Authors

Won, Byoungjun

Oh, Geun-Ha

Oh, Il-Kwon https://orcid.org/0000-0002-1266-3157
Funding

Funding for this research was provided by:

Ministry of Science and ICT, South Korea (2020M3F3A2A01082593)
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Text and Data Mining valid from 2024-10-23

Version of Record valid from 2024-10-23
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Article History

Received: 24 June 2024

Accepted: 3 October 2024

First Online: 23 October 2024

Declarations

:

: The authors declare that they have no conflict of interest.

: Not applicable.

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