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Microstructure and stress evolution of W nanofilms prepared by arc ion plating under different deposition time and substrate bias

Published Online: 2024-10-18

Published Print: 2024-10

Authors

Li, Xi

Mu, Zongxin https://orcid.org/0009-0009-7947-4228
Song, Xinyu
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Text and Data Mining valid from 2024-10-01

Version of Record valid from 2024-10-01
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Article History

Received: 27 July 2024

Accepted: 9 October 2024

First Online: 18 October 2024

Declarations

:

: The authors declare that they have no conflict of interest.

: Not applicable.

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