Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures
Crossref DOI link: https://doi.org/10.1007/s10854-014-2322-3
Published Online: 2014-09-23
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Deok-Kyu
Park, Choon-Bae
Text and Data Mining valid from 2014-09-23