AlN thin films deposited on different Si-based substrates through RF magnetron sputtering
Crossref DOI link: https://doi.org/10.1007/s10854-014-2467-0
Published Online: 2014-11-04
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jiao, Xiangquan
Shi, Yu
Zhong, Hui
Zhang, Rui
Yang, Jie
Text and Data Mining valid from 2014-11-04