Investigation, characterization and effect of substrate position on thick AlN layers grown by high temperature chemical vapor deposition
Crossref DOI link: https://doi.org/10.1007/s10854-014-2532-8
Published Online: 2014-11-26
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Dian
Liu, Fa-Min
Cai, Lu-Gang
Text and Data Mining valid from 2014-11-26
