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The preparation of ScAlN(002) alloy thin films deposited on Si(100) substrates by DC reactive magnetron sputtering

Crossref DOI link: https://doi.org/10.1007/s10854-014-2661-0

Published Online: 2015-01-09

Published Print: 2015-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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