Effects of substrate temperature on structural and electrical properties of cubic silicon carbide films deposited by hot wire chemical vapor deposition technique
Crossref DOI link: https://doi.org/10.1007/s10854-015-2767-z
Published Online: 2015-01-31
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jha, Himanshu S.
Agarwal, Pratima
Text and Data Mining valid from 2015-01-31