Influence of annealing on microstructure and piezoresistive properties of boron-doped hydrogenated nanocrystalline silicon thin films prepared by PECVD
Crossref DOI link: https://doi.org/10.1007/s10854-015-3079-z
Published Online: 2015-05-19
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pan, Haibin http://orcid.org/0000-0002-7901-9737
Ding, Jianning
Cheng, Guanggui
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