Pre-oxidation of AlN substrates for subsequent metallization
Crossref DOI link: https://doi.org/10.1007/s10854-015-3160-7
Published Online: 2015-05-10
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yeh, Chun-Ting
Tuan, Wei-Hsing
Text and Data Mining valid from 2015-05-10
