Effects of substrate temperature on the properties of sputtered TiN thin films
Crossref DOI link: https://doi.org/10.1007/s10854-015-4093-x
Published Online: 2015-11-23
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ghobadi, Nader
Ganji, Mohsen
Luna, Carlos
Arman, Ali
Ahmadpourian, Azin
Text and Data Mining valid from 2015-11-23