Preparation of ScAlN films as a function of sputtering atmosphere
Crossref DOI link: https://doi.org/10.1007/s10854-016-4359-y
Published Online: 2016-01-29
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tang, JiaLin
Niu, Dongwei
Yang, Yixi
Zhou, Dong
Yang, Chengtao
Funding for this research was provided by:
Fundamental Research Funds for the Central Universities of Ministry of Education of China
Text and Data Mining valid from 2016-01-29