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Oxidation kinetics of $$\hbox {ZrO}_2$$ ZrO 2 films on Si by differential scanning calorimetry

Crossref DOI link: https://doi.org/10.1007/s10854-016-4376-x

Published Online: 2016-01-30

Published Print: 2016-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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