Growth of 3C-SiC on Si(100) by LPCVD using a modified process after the clean step
Crossref DOI link: https://doi.org/10.1007/s10854-016-4670-7
Published Online: 2016-03-19
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Zhifei
Li, Yun
Yin, Zhijun
Li, Zhonghui
Text and Data Mining valid from 2016-03-19