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Influence of RF power on structural optical and electrical properties of hydrogenated nano-crystalline silicon (nc-Si:H) thin films deposited by PE-CVD

Crossref DOI link: https://doi.org/10.1007/s10854-016-5024-1

Published Online: 2016-05-24

Published Print: 2016-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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