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Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry

Crossref DOI link: https://doi.org/10.1007/s10854-016-5650-7

Published Online: 2016-09-02

Published Print: 2017-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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