Solid-silica core/mesoporous-silica shell composite abrasives: synthesis, characterization, and the effect of mesoporous shell structures on CMP
Crossref DOI link: https://doi.org/10.1007/s10854-017-8317-0
Published Online: 2017-11-28
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Yang
Zuo, Changzhi
Ma, Xiangyu
Chen, Ailian
License valid from 2017-11-28
