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Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method

Crossref DOI link: https://doi.org/10.1007/s10854-018-0351-z

Published Online: 2018-11-13

Published Print: 2019-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Atuchin, V. V. https://orcid.org/0000-0002-7424-5604
Lebedev, M. S.

Korolkov, I. V.

Kruchinin, V. N.

Maksimovskii, E. A.

Trubin, S. V.
Funding

Funding for this research was provided by:

Russian Government (V.45.1.5)

Russian Foundation for Basic Research (16-52-48010, 17-52-53031)
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Article History

Received: 8 October 2018

Accepted: 8 November 2018

First Online: 13 November 2018