Effect of nitrogen passivation/pre nitration on interface properties of atomic layer deposited HfO2
Crossref DOI link: https://doi.org/10.1007/s10854-018-8791-z
Published Online: 2018-02-20
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maurya, Savita
Text and Data Mining valid from 2018-02-20
Version of Record valid from 2018-02-20
Article History
Received: 5 January 2018
Accepted: 17 February 2018
First Online: 20 February 2018