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Effects of sintering processes on the element chemical states of In, Sn and O in ITO targets

Published Online: 2018-03-15

Published Print: 2018-05

Authors

Qin, Kai

Mei, Fangsheng

Yuan, Tiechui

Li, Ruidi

Jiang, Jun

Niu, Pengda

Chen, Hui
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Text and Data Mining valid from 2018-03-15

Version of Record valid from 2018-03-15
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Article History

Received: 13 November 2017

Accepted: 1 March 2018

First Online: 15 March 2018

Document is current