Ellipsometry-based conductivity extraction in case of phosphorus doped polysilicon
Crossref DOI link: https://doi.org/10.1007/s10854-018-9260-4
Published Online: 2018-05-17
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kemiha, A.
Birouk, B.
Raskin, J.-P.
Text and Data Mining valid from 2018-05-17
Article History
Received: 17 January 2018
Accepted: 8 May 2018
First Online: 17 May 2018