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3D imaging of backside metallization of SiC-SBD influenced by annealing

Crossref DOI link: https://doi.org/10.1007/s10854-019-01428-4

Published Online: 2019-05-07

Published Print: 2019-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Sameshima, Junichiro https://orcid.org/0000-0003-4268-3711
Sugahara, Toru

Ishina, Toshiyuki

Nagao, Shijo

Suganuma, Katsuaki
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Text and Data Mining valid from 2019-05-07
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Article History

Received: 3 December 2018

Accepted: 29 April 2019

First Online: 7 May 2019