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Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure

Published Online: 2019-08-02

Published Print: 2019-08

Authors

Gupta, Nidhi

Dutta, Shankar

Panchal, Abha

Yadav, Isha

Kumar, Surender

Parmar, Yashoda

Vanjari, Siva Rama Krishna

Jain, K. K.

Bhattacharya, D. K.
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Text and Data Mining valid from 2019-08-01

Version of Record valid from 2019-08-01
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Article History

Received: 17 April 2019

Accepted: 30 July 2019

First Online: 2 August 2019

Document is current