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Silver diffusion effects in aluminum nitride/silver films on polydimethylsiloxane gratings via nitrogen–argon sputtering

Crossref DOI link: https://doi.org/10.1007/s10854-020-03246-5

Published Online: 2020-03-24

Published Print: 2020-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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