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Influences of substrate temperature and Ar flow on the properties of RF sputtered Mo thin films

Published Online: 2020-05-15

Published Print: 2020-07

Authors

Chavan, Kalyan B.

Desarada, Sachin V.

Chaure, Nandu B.
Funding

Funding for this research was provided by:

Science and Engineering Research Board

DST PURSE
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Text and Data Mining valid from 2020-05-15

Version of Record valid from 2020-05-15
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Article History

Received: 29 March 2020

Accepted: 8 May 2020

First Online: 15 May 2020

Document is current