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Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition

Published Online: 2020-08-31

Published Print: 2020-10

Authors

Wu, Yong

Cao, Fa

Ji, Xiaohong https://orcid.org/0000-0003-2083-0899
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51572092)
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Text and Data Mining valid from 2020-08-31

Version of Record valid from 2020-08-31
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Article History

Received: 21 January 2020

Accepted: 19 August 2020

First Online: 31 August 2020

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