Jiang, Xin
Lin, Huai
Xue, Chuang
Zhang, Gang http://orcid.org/0000-0001-7933-5871
Jiang, Wenlong
Xing, Guozhong
Funding for this research was provided by:
the Director Fund of Institute of Microelectronics (E0YR063004)
the Dedicated Fund of Chinese Academy of Sciences (E0SR023002)
the China Postdoctoral Science Foundation (2017M611735)
Thirteenth five year” science and technology research Project of Jilin province department of education (JJKH20200420KJ)
Article History
Received: 19 May 2020
Accepted: 6 September 2020
First Online: 19 September 2020