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Structural and physical characteristics of sputter deposited zirconium nitride thin films by sputtering at various time in Ar-N2 atmosphere

Crossref DOI link: https://doi.org/10.1007/s10854-020-04664-1

Published Online: 2020-10-27

Published Print: 2020-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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