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Authors
Cheng, Xiaohong
Li, Yongliang https://orcid.org/0000-0002-5590-861X
Liu, Haoyan
Zan, Ying
Lu, Yihong
Zhang, Qingzhu
Li, Junjie
Du, Anyan
Wu, Zhenhua
Luo, Jun
Wang, Wenwu
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Funding
Funding for this research was provided by:
Science and technology program of Beijing Municipal Science and Technology Commission (Z201100004220001)
CAS Pioneer Hundred Talents Program
Foundation of President of the Institute of Microelectronics, Chinese Academy of Sciences
National Key Project of Science and Technology of China (2017ZX02315001-002)
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Article History
Received: 19 August 2020
Accepted: 23 October 2020
First Online: 2 November 2020
