The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films
Crossref DOI link: https://doi.org/10.1007/s10854-020-04810-9
Published Online: 2020-11-13
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Khánh, Nguyen Quoc http://orcid.org/0000-0001-7032-2919
Radó, János
Horváth, Zsolt Endre
Soleimani, Saeedeh
Oyunbolor, Binderiya
Volk, János
Text and Data Mining valid from 2020-11-13
Version of Record valid from 2020-11-13
Article History
Received: 27 July 2020
Accepted: 1 November 2020
First Online: 13 November 2020