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Synergistic effect of CO2 and PH3 on the properties of n-type nanocrystalline silicon oxide prepared by plasma-enhanced chemical vapor deposition

Published Online: 2021-01-03

Published Print: 2021-02

Authors

You, Jiachuan https://orcid.org/0000-0002-1767-3717
Zhao, Lei

Diao, Hongwei

Wang, Wenjing
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (61674151)

“Transformational Technologies for Clean Energy and Demonstration”, Strategic Priority Research Program of the Chinese Academy of Sciences (XDA21060500)

Beijing Municipal Science and Technology Project (Z181100004718003)
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Text and Data Mining valid from 2021-01-03

Version of Record valid from 2021-01-03
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Article History

Received: 25 September 2020

Accepted: 2 December 2020

First Online: 3 January 2021

Document is current