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The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors

Crossref DOI link: https://doi.org/10.1007/s10854-022-08097-w

Published Online: 2022-04-18

Published Print: 2022-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Patil, Sumit R.

Barhate, Viral N.

Patil, Vilas S.

Agrawal, Khushabu S.

Mahajan, Ashok M. https://orcid.org/0000-0003-4212-299X
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Text and Data Mining valid from 2022-04-18

Version of Record valid from 2022-04-18
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Article History

Received: 7 September 2021

Accepted: 14 March 2022

First Online: 18 April 2022

Declarations

:

: Sumit R. Patil, Viral N. Barhate, Vilas S. Patil, Khushabu S. Agrawal, and Ashok M. Mahajan declare that they have no conflict of interest.

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