Crossmark

Investigating the edge effects of Cu electroplating on the SAMs-coated Si substrate

Published Online: 2023-04-27

Published Print: 2023-04

Authors

Luo, Xiaobin

Zhang, Shuangshuang

Liu, Zhu https://orcid.org/0000-0002-1266-6059
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (61664009)
License Information

Text and Data Mining valid from 2023-04-01

Version of Record valid from 2023-04-01
More Information

Article History

Received: 30 December 2022

Accepted: 15 April 2023

First Online: 27 April 2023

Declarations

:

: The authors have no relevant financial or non-financial interests to disclose.

Document is current