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Sputter deposition of hydrogen-doped ZnO layers under humid oxygen plasma

Crossref DOI link: https://doi.org/10.1007/s10854-024-13172-5

Published Online: 2024-07-17

Published Print: 2024-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Hossein-Babaei, Faramarz https://orcid.org/0000-0002-6741-1336
Alizadeh, Armin
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Text and Data Mining valid from 2024-07-01

Version of Record valid from 2024-07-01
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Article History

Received: 29 April 2024

Accepted: 6 July 2024

First Online: 17 July 2024

Declarations

:

: The authors have no conflicts to disclose.