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Tuning electrical performance of Sc2O3/SiO2/Si MOS capacitors through interface and thermal processing

Crossref DOI link: https://doi.org/10.1007/s10854-025-16337-y

Published Online: 2025-12-12

Published Print: 2025-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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