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Microstructure of Thin Films of Tantalum and its Compounds

Published Online: 2021-08-28

Published Print: 2021-07

Authors

Petrovskaya, A. S.

Lapitskaya, V. A.

Mel’nikova, G. B.

Kuznetsova, T. A.

Chizhik, S. A.

Zykova, A. V.

Safonov, V. I.
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Text and Data Mining valid from 2021-07-01

Version of Record valid from 2021-07-01
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Article History

Received: 24 February 2020

First Online: 28 August 2021

Document is current