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Influence of the Laser Pulse Annealing of the Silicon Implanted with Indium and Arsenic Ions on its Optical and Structural Properties

Crossref DOI link: https://doi.org/10.1007/s10891-024-02946-7

Published Online: 2024-06-14

Published Print: 2024-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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