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Influence of Different CH4/N2 Ratios on Structural and Mechanical Properties of a-CNx:H Film Synthesized Using Plasma Focus

Crossref DOI link: https://doi.org/10.1007/s10894-014-9723-4

Published Online: 2014-06-01

Published Print: 2014-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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