Copper Chemical Mechanical Polishing Performances of Polystyrene/Ceria Hybrid Abrasives with a Core/Shell Structure
Crossref DOI link: https://doi.org/10.1007/s10904-018-0840-9
Published Online: 2018-03-28
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Ailian
Long, Jielong
Li, Zhina
Chen, Yang
Text and Data Mining valid from 2018-03-28
Article History
Received: 1 February 2018
Accepted: 24 March 2018
First Online: 28 March 2018