Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
Crossref DOI link: https://doi.org/10.1007/s10909-020-02336-2
Published Online: 2020-01-30
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sheagren, Calder http://orcid.org/0000-0001-7439-2906
Barry, Peter
Shirokoff, Erik
Tang, Qing Yang
Funding for this research was provided by:
National Science Foundation (AST-1554565)
Text and Data Mining valid from 2020-01-30
Version of Record valid from 2020-01-30
Article History
Received: 20 August 2019
Accepted: 13 January 2020
First Online: 30 January 2020