Quantitative Simultaneous Determination for Young’s Modulus and Adhesion of Low-k Thin Film by Non-destructive CZM-SAW Technique
Crossref DOI link: https://doi.org/10.1007/s10921-019-0597-2
Published Online: 2019-05-17
Published Print: 2019-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Qi, Haiyang
Xiao, Xia
Kong, Tao
Funding for this research was provided by:
National Natural Science Foundation of China (No. 61571319)
Text and Data Mining valid from 2019-05-17
Version of Record valid from 2019-05-17
Article History
Received: 7 September 2018
Accepted: 9 May 2019
First Online: 17 May 2019