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Accurate Detection Method of Si3N4 Wafer Fuzzy Defects Embedded with Hybrid Cross-Attention Mechanism and Feature Gradient Histogram

Published Online: 2025-10-22

Published Print: 2025-12

Authors

Liao, Dahai

Zheng, Qi

Liu, Changzheng

Hu, Kun

Jiang, Hong

Ma, Chengwen

Wang, Wei
Funding

Funding for this research was provided by:

Key Project of Natural Science Foundation of Jiangxi Province (2021A C B 204012, 2021A C B 204012)

Natural Science Foundation of Jiangxi Province (20252BAC240342, 20252BAC240342)
License Information

Text and Data Mining valid from 2025-10-22

Version of Record valid from 2025-10-22
More Information

Article History

Received: 30 April 2025

Accepted: 16 October 2025

First Online: 22 October 2025

Declarations

:

: The authors declare no competing interests.

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