Ceria coated hexagonal mesoporous silica core–shell composite particle abrasives for improved chemical–mechanical planarization performance
Crossref DOI link: https://doi.org/10.1007/s10934-018-0699-8
Published Online: 2018-11-30
Published Print: 2019-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Ailian
Wang, Wanying
Ma, Xiangyu
Chen, Yang
Text and Data Mining valid from 2018-11-30
Article History
First Online: 30 November 2018
Conflict of interest
: The authors declare no conflict of interest.