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Elaboration and characterization of nanoporous SU-8 template using PMMA as porogen

Published Online: 2021-02-01

Published Print: 2021-06

Authors

Vu, Duc Tu https://orcid.org/0000-0002-5651-3337
Pham, Thi Nhung

Hsu, Chia-Chen

Benisty, Henri

Lai, Ngoc Diep
Funding

Funding for this research was provided by:

Agence Nationale de la Recherche (ANR) of France (ANR-17-CE09-0047)

Ministry of Science and Technology, Taiwan (107-2923-M-194-001-MY3)
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Text and Data Mining valid from 2021-02-01

Version of Record valid from 2021-02-01
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Article History

Accepted: 13 January 2021

First Online: 1 February 2021

Document is current