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Determination of the density of silicon–nitride thin films by ion-beam analytical techniques (RBS, PIXE, STIM)

Crossref DOI link: https://doi.org/10.1007/s10967-015-4102-9

Published Online: 2015-03-28

Published Print: 2016-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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