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Fabrication of rigid stamp on a cylindrical substrate using hydrogen silsesquioxane/ZrO2 nanoparticle composite material for roll-to-roll nanoimprinting process

Crossref DOI link: https://doi.org/10.1007/s10971-014-3571-6

Published Online: 2014-12-13

Published Print: 2015-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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