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Thermodynamic study on the carbothermal nitridation synthesis of silicon nitride using silicon kerf loss

Published Online: 2019-07-19

Published Print: 2020-02

Authors

Jin, Xing

Kong, Jian

Jiang, Shengnan

Wei, Donghui

Xing, Pengfei

Zhuang, Yanxin
Funding

Funding for this research was provided by:

National Key Research and Development Program of China (2017YFB0310302, 2018YFC1901804, 2018YFC1901805)
License Information

Text and Data Mining valid from 2019-07-19

Version of Record valid from 2019-07-19
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Article History

Received: 30 October 2018

Accepted: 2 July 2019

First Online: 19 July 2019

Document is current