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Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip

Published Online: 2023-03-15

Published Print: 2023-12

Authors

Ha, Thi Dep
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Text and Data Mining valid from 2023-03-15

Version of Record valid from 2023-03-15
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Article History

Received: 3 October 2022

Accepted: 28 February 2023

First Online: 15 March 2023

Declarations

:

: The authors declare that they have no conflict of interest.

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