Crossmark

Enhancement of the quality factor of thin-film-piezoelectric-on-Si MEMS resonator using BOX shape phononic crystal

Published Online: 2025-06-09

Published Print: 2025-12

Authors

Awad, Mohammed

Workie, Temesgen Bailie

Natalia, Koriakova

Bao, Jing-Fu

Hashimoto, Ken-ya
License Information

Text and Data Mining valid from 2025-06-09

Version of Record valid from 2025-06-09
More Information

Article History

Received: 12 February 2025

Accepted: 23 May 2025

First Online: 9 June 2025

Declarations

:

: The authors declare no conflict of interest.

Document is current